High Vacuum Pump Technology
High Vacuum Pump Technology : Leybold
Rotary Vane Pump, Diffusion Pump, Scroll Pump, Turbo Pump, Ion Pump, Leak Detection, Valve Component ปั๊มสุญญากาศ คุณภาพสูง
Specification :
Rotary Vane Pump
• Pumping speed 5 to 25 m3/h
• Ultimate pressure 2x10-3 mbar
Scroll Pump
• Pumping speed 5 to 25.2 m3/h
• Ultimate pressure 9.3x10-3 mbar
Diffusions Pump
• Speed (Air) 65 to 50,000 l/s
• Operating range (with cold cap)
1.3x10-3 to 6.5x10-9 mbar
Turbo Pump
• Pumping speed (Nitrogen) 40 to 6,000 l/s
• Base pressure < 1x10-10 mbar
Cryo Pump
• Pumping Speed (H2O) 30,000 L/sec
• Max Throughput 10 mbar.L/sec
Instrument
• Measurement Range atm to 6.7x10-12 mbar
Valve and Component
• Vacuum Range atm to <10-11 mbar
• Size Range 0.75 to 10 in.
Leak Detector
• Sensitivity Ranges 10-1 to 10-10 atm cc/sec
• Minimum Detectable Leak 2x10-11 atm cc/sec
DRYVAC : Dry vacuum pump
• Pumping speed 450m3/hr to 5,000 m3/hr Inverter option
• Ultimate pressure < 5x10-3 mbar.
Vacuum Lubricant Mineral oil & Silicone oil
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Thin Film deposition systems for
- Glass coating applications (Architectural-, Automotive glass, Electronic pre -products (FPD) and solar / photo voltaic products)
- Data-storage applications (CD, DVD, memory disk, read heads)
- Surface Treatments (functional, decorative) - Optical Coating applications (Ophthalmic, precision opto-electronics)
- Roll / Web coatings on films or foils -
Vacuum Furnaces (OEM & End Users)
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Glove Box Manufacturers
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Device Processing (TV Tubes, Lasers, Lighting, X-ray / Microwave devices)
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Medical Accelerators tubes
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Other industrial applications